Micromirror comsol tutorial pdf

This example describes an array of heating tubes submerged in a vessel with fluid flow entering at the bottom. To view the mass transfer boundary conditions, expand the transport of diluted species and view the various tabs which include boundary conditions and initial values. Optics simulation with comsol multiphysics simulating graphenebased photonic and optoelectronic devices live demo graphene frequency and time domain modeling. Comsol is the developer of comsol multiphysics software, an interactive environment for modeling and simulating scientific and engineering problems. E possibile scaricare i file dei modelli e delle app demo pronti alluso e le. Comsol tutorial heat conduction in a simple heat sink aluminium cooling a high voltage copper cable. Lets change a parameter and see the effect on the profile. Learn how to use comsol multiphysics simulation software at a guided training course or webinar. Setup the model using the graphical user interface, then save the model as a mfile. Direct solver conjugate gradient solver cgs gmres solver fgmres solver bicgstab geometric multigrid gmg an example of gmg solver.

Bhattacharyya1 1institute of radio physics and electronics, university of calcutta, west bengal, india corresponding author. The user can simulate a design, test for the capacitance and observe the effects on capacitance by changing parameters such as dielectric permittivity of materials. If you click on no flux 1 you can find the equation that is applied under equation and the boundary on which this equation is applied. Under input section on the left hand side, you can view and change any parameter values.

Comsol lep tutorial for tank flow system two cstr in series. The proposed micromirror employs a parallel plate mirror structure held by lshaped arms on all four sides of the micromirror 22,23 and is simulated using comsol multiphysics. Comsol multiphysics simulations of microfluidic systems for biomedical applications maria dimaki, jacob moresco lange, patricia vazquez, pranjul shah, fridolin okkels and winnie edith svendsen dtu nanotech department of micro and nanotechnology, technical university of denmark, dk2800, kgs. We calculate the heat conduction in a simple heat sink aluminium cooling a high voltage copper cable. Click on comsol access present at the bottom of the page. And do not forget about right click, you could do every modeling and simulation just with right click. Model with comsol multiphysics on meshes based on mri and scanned data the following software support export to comsol mesh format mimics by materialise, read more on. Design and simulation of mems based electrothermal.

Containing a model tree, the model builder outlines the structure of your model. Design and modeling of an electrostatic ally actuated mems. Micromirrors are used in certain mems devices to control optic elements. Download the model files and stepbystep instructions here. For various applied voltage, it produces displacements in eight different directions. For example, one well known mems device is the accelerometer i. The driving voltage is given in the anchor end which produces larger displacement. It is typically quite small, and arrays of such devices can be implemented in projectors.

Submit a plot similar to figure 52 in the documentation. The model is based on a micromodel described by oostrom et al. Multiphysics software for finite element approach and real world simulations. Dmd for digital cinema next to a dmd for pico displays. Research article some aspects of analysis of a micromirror. A 4arm ushaped actuator with a micromirror has been designed.

As alternative we can use the already constructed geometry by applying the steps from part b. The pressure and the velocity field are the solution of the navierstokes equations. Intro to modeling heat transfer with comsol multiphysics. A method to enhance stroke level of a mems micromirror with. Request pdf a comsol model to analyse the structural mechanical problem in an electrostatically controlled prestressed micromirror in nowadays. This tutorial shows how to couple three physics interfaces to model evaporative cooling. Simulating graphenebased photonic and optoelectronic devices. Application areas include mechanical engineering, civil engineering, geomechanics, biomechanics, and.

The best source for comsol is absolutely its documentations and the comsol website. The effects that need to be taken into account are heat transfer, transport of water vapor, and fluid flow. Apr 02, 2020 comsol mems tutorial pdf the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. Structural mechanical analysis of mems micromirror using. A model of an electrostatically controlled micromirror was developed using the mems module with the large deformation and initial stress features. This section shows the fundamentals of how to set up and solve the liftoff of a prestressed plated devices. Jun 30, 2019 comsol mems tutorial pdf the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and. Warning your internet explorer is in compatibility mode and may not be displaying the website correctly.

Comsol desktop there is a corresponding command you can type at the matlab prompt. Vibrating micromirror with viscous and thermal damping. Following the steps given in the documentation of the comsol heat conduction in a slab tutorial see next page. Click on run in browser to start the application you will see that following window opens which has input parameters, description, graphical features and a few buttons. Uh innovation centre college lane hatfield hertfordshire al10 9ab. Design and analysis of the performance of a torsional micromirror for an optical switching system, ajay a. Micromirror and thinfilm resonator are pure continuum mechanics models.

An automatic notification and case number is sent to you by email. Comsol multiphysics simulations of microfluidic systems. After you are done, click on compute button present above the input. This will open up comsol library where you see many comsol files to solve chemical reaction engineering problems. The plating process can control this stress even for similar materials. Jan 25, 2015 this video shows how to set up a model of flow through an etched micromodel using comsol. Of course, i cant share a clients project so here i will use a basic mems micromirror structure for illustrative purposes. An approach for model updating of a multiphysics mems.

What are good sources of tutorials to learn comsol. The ideal schottky, thermionic emission, and continuous quasifermi level boundary conditions have been enhanced to improve the accuracy of your semiconductor models, while saving. The structural mechanics module includes both predefined material models to choose from and the ability to enter userdefined material models, depending on the nature of your analysis. This model example illustrates applications of this type that would nominally be built using the. In a parallel plate micromirror model, when a dc voltage is applied between the two plates, the generated electrostatic force, f d, pulls the micromirror surface. In the comsol multiphysics software any number of physics can be combined in one and the same simulation. This is a multiphysics model because it involves fluid dynamics coupled with heat transfer. The comsol multiphysics fea software comes with predefined physics interfaces with specialized settings, making it easy to set up and run analyses. Micromirror model is simulated using comsol multiphysics 4. After a general introduction to the user interface, several tutorials will take you step by step through sample models that highlight important features.

Click on tank volume tab to view the volume of each tank with time step 7. Simulating graphenebased photonic and optoelectronic. A comsol model to analyse the structural mechanical problem in. Design of mems based elecrostatically controlled micromirror. The application gallery features comsol multiphysics. The coupled multiphysics simulation and study of the electrical, thermal and most importantly, the mechanical behavior of the mirror is done using thermalelectricstructural interaction mode of comsol. The comsol desktop 7 the comsol desktop the user interface streamlines the modeling workflow with the model builder. One such device is the electrostatically controlled micromirror. The ga is coupled to a commercially available multiphysics finite element program. Uber comsol multiphysics modellierungsbeispiele zum.

Comsol, comsol multiphysics, comsol script, comsol reaction engineering lab, and. Sep 05, 2006 the ga is coupled to a commercially available multiphysics finite element program. This video shows how to set up a model of flow through an etched micromodel using comsol. Jun 25, 2019 comsol mems tutorial pdf posted on june 25, 2019 by admin the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical. In part a of the tutorial we construct the geometry of the problem to be solved. Comsol mems tutorial pdf the application gallery features comsol multiphysics tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and.

Vibrating micromirror with viscous and thermal damping tutorial. An approach for model updating of a multiphysics mems micromirror. Home tutorials comsol tutorials comsol tutorials download. Vibrating micromirror with viscous and thermal damping comsol. Introduction to comsol multiphysics 19982012 comsol protected by u. Use the comsol desktop to get your first model implemented using the comsol java api. Multiphysics modeling of mems devices november 20 executive summary power is increased with dedicated tools. Particular functionality may be common to several products. In a parallel plate micromirror model, when a dc voltage is. This model of a vibrating micromirror surrounded by air uses the thermoacousticshell interaction user interface to model the fluidsolid interaction, and it thus includes the correct viscous and thermal damping of the mirror from the surrounding air. You dont need any previous knowledge about this program and will get to know the basics in order to perform your own simple simulation and analyse the obtained data. See how to simulate a vibrating micromirror surrounded by air using comsol multiphysics.

Pdf micromirror is a very small mirror based on the principle of micro electro. Femlab heat transfer tutorial rev rowan university. By the end you will be well on your way to reaping all. The comsol multiphysics physics builder users guide. Semiconductor module updates for users of the semiconductor module, comsol multiphysics version 5. The informative charts give you an idea of comsols capability by associated files, functions, and builtin options. In this tutorial, we will solve one physical problem using a numerical toolbox called comsol multiphysics femlab. With comsol, it is also possible to observe the effects of temperature on the capacitance value. We discuss methods that involve simple approximations, highfidelity nonisothermal flow coupling, modeling heat transfer at fluidsolid interfaces, boundary approximations using heat transfer coefficients, techniques to fully resolve the flow and temperature fields, and more. Analyzing the viscous and thermal damping of a mems. More in depth and advanced topics included with this tutorial are used to show you some of the many options available in comsol. Furthermore, this example may also be defined and modeled using components from the following product combinations. Fem analysis using comsol multiphysics in order to analyze the static behavior of the micromirror, comsol multiphysics fem software is used.

Watch this archived webinar to learn how to simulate heat transfer in fluids using the comsol multiphysics software. Comsol environment facilitates further analysis by making whatif cases easy to. Broers building 21 j j thomson avenue cambridge cb3 0fa. The plot shows the curvature or displacement in the prestressed plated device. The wet surface feature is used to implement the source term for the water vapor and to.

It also provides a quick introduction to creating applications using the application builder. If you are reading the documentation as a pdf file on your computer, the blue links do not work to open a model or content referenced in a different users guide. A method to enhance stroke level of a mems micromirror. Pdf some aspects of analysis of a micromirror researchgate. It provides an overview of the comsol environment with examples that show you how to use the comsol desktop user interface and the model builder. Modeling using the graphical user interface3d example. In the context of this, issues of mode tracking, eigenvector comparisons, and approximate function evaluations are discussed. To access any comsol files, you need to have a comsol account which can be created for free. In order to solve linear system comsol has several solvers. The approach is demonstrated on a microelectromechanical mems micromirror which is governed by both structural and electrostatic physics. Change the inlet concentration in tank 1 from molm3 to 1500 molm3.

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